A Novel Approach Towards Standardization of MEMS Process POPP, Jens; WAGENER, Andreas; ORTLOFF, Dirk; BEUNDER, Mike: A Novel Approach Towards Standardization of MEMS Process Development. In: Proceedings of the 9th International Conference on the Commercialization of Micro and Nano Systems, Edmonton, 2004. – COMS 2004
Economic modelling - The Link between Management and Engineering WAHL, M. G.: Economic modelling - The Link between Management and Engineering. Symposium on Global Project and Manufacturing Management, Siegen, 2004
PRINCE - Design Tools for Micro System Fabrication Management WAGENER, A.; POPP, J.; HAHN, K.; BRÜCK, R.: PRINCE - Design Tools for Micro System Fabrication Management. In: 10. GMM Workshop: Methoden und Werkzeuge für den Entwurf von Mikrosystemen, Cottbus, 2004. – GMM 2004
Process design environment for microfabrication technologies WAGENER, A.; POPP, J.; HAHN, K.: Process design environment for microfabrication technologies. In: Proceedings of SPIE: Micromachining and Microfabrication Process Technology IX, San Jose Bd. 5342, 2004. – Photonics West 2004
Konzeption und Implementierung einer Material- und Effektdatenbank für Simulation und Analyse in der Mikrosystemtechnik Schmidt, T.: Konzeption und Implementierung einer Material- und Effektdatenbank für Simulation und Analyse in der Mikrosystemtechnik, Universitä̈t Siegen, Diplomarbeit, 2004
Technology Interfaces to Microsystem and Nanoelectronic Processes Schmidt, T.; Wagener, A.; Popp, J.; Hahn, K.: Technology Interfaces to Microsystem and Nanoelectronic Processes. In: Proceedings of SPIE: Smart Structures, Devices, and Systems II, Sydney Bd. 5649, 2004, S. 288–296. – SPIE Sydney 2004
