Process Design and Tracking Support for MEMS A. Wagener and T. Schmidt and J. Popp and K. Hahn and R. Brück and D. Ortloff, Proceedings of SPIE: Micromachining and Microfabrication Process Technology XI, 6109, Photonics West 2006, Process Design and Tracking Support for MEMS, 2006
A MEMS-EDA-methodology Based on Process Management R. Brück and K. Hahn and J. Popp and T. Schmidt and A. Wagener and M. Wahl, Proceedings of the International Conference Mixed Design of Integrated Circuits and Systems, Gdynia, MIXDES 2006, A MEMS-EDA-methodology Based on Process Management, 2006
Management and Verification for MEMS Fabrication Processes T. Schmidt and D. Ortloff and K. Hahn and A. Wagener and J. Popp and R. Brück, Proceedings of SPIE: MEMS MOEMS and Micromachining II, Strasbourg, 6186, Photonics Europe 2006, Management and Verification for MEMS Fabrication Processes, 2006
Optimization of MEMS fabrication process design by virtual experiments T. Schmidt and K. Hahn and T. Binder and J. Popp and A. Wagener and R. Brück, Proceedings of SPIE: Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, Adelaide, 6415, Smart Materials, Nano- and Micro-Smart Systems 2006, Optimization of MEMS fabrication process design by virtual experiments, 2006
Verifikation hochkomplexer Randbedingungen beim IC-Entwurf J. Freuer, G. Jerke, A. Schäfer, K. Hahn, R. Brück, A. Nassaj, W. Nebel: Ein Verfahren zur Verifikation hochkomplexer Randbedingungen beim IC-Entwurf; Analog 2006
